Results of the proposed programm will enable understanding, design and fabrication of new 3D microstructures that will have impact in various fields of science and tecnology such as - fundamental research work (material science, new effects, new technologies) related to high-tec disciplines as electronics, telecommunications, computer science, sensorics etc. - in the field of quality of life and healthcare (new diagnostic methods with enhanced x-ray detectors and similar) In the frame of the research work on the project various microstructures with strong scientific as well as applicative potential were designed and realised, such as - prototypes of microcantilevers for applications in various sensors as strain gauges, accellerometers, resonant sensors, for actuators and similar - thin silicon membranes for applications in piezoresistive pressure and humidity sensors, biosensors etc. - bossed membranes for applications in microsensors with overload protection etc. - prototypes of various V-grooves (U, V, Omega) for applications in optoelectronic telecommunications, for fiber joining and similar - prototypes of microtips for AFM, FED displays and other - prototypes of silicon micromirrors on different crystall planes for optoelectronic telecommunications applications - prototypes of x-ray microstrip detectors with improved sensitivity for medical applications (mammography and others) - prototypes of smart sensors for various applications in sensor and actuator systems (piezoresistive pressure sensors etc.)