Dr. Matjaž Panjan had an invited lecture at 43rd International Conference on Metallurgical Coatings & Thin Films, (San Diego, USA). In the talk Dr. Panjan reviewed understanding of the ionization zones in magnetron sputtering. He examined processes which govern formation, sustainability, organization and dynamics of the ionization zones. He showed that the presence of ionization zones significantly alters spatial distribution of the plasma potential and, as a consequence, causes azimuthal dependence of processes associated with the sustainability of the discharge, including: electron-gas collisions, secondary electron emission and sputtering. Properties of ionization zones and formation of plasma patterns were therefore discussed with respect to these azimuthally non-homogeneous processes. It was also shown that spokes play an important role in the transport of electrons and ions in the magnetron discharges.
B.04 Guest lecture
COBISS.SI-ID: 29478183Dr. Matjaž Panjan had an invited lecture at the "16th Joint Vacuum Conference and 14th European Vacuum Conference". In the talk he presented reasons for self-organization of magnetron plasma into dense and periodic regions. He discussed the phenomenon of ionization zones in continuous DC and pulsed HiPIMS discharges. Dr. Panjan described hypotheses for the formation, sustainability, organization and dynamics of ionization zones. He also presented emissive probe measurements and showed that ionization zones cause highly non-uniform plasma potential distribution with large gradients in the azimuthal direction. The features of plasma potential distribution were discussed with respect to the motion of electrons and ions and properties of ionization zones, including their shape, dynamics and self-organization.
B.04 Guest lecture
COBISS.SI-ID: 29557799At the invitation of a research group at Max-Planck Institut für Plasmaphysik (IPP) in Garching (Germany), Dr. Matjaž Panjan had an invited lecture entitled "Magnetron sputtering: illuminating physics of ionization zones". (https://www.ipp.mpg.de/4160341/archiv-2016). Max-Planck Institut für Plasmaphysik is one of the most renowned institutes for fusion research. High-temperature plasma in fusion reactors is very different from the low-temperature plasma in the magnetrons, but in both plasmas strong turbulences are typically present. Plasma turbulences presents one of the most serious problems for the stability of tokamak plasma and thus for the self-sustainability of fusion reactions. The talk on plasma non-homogeneities in the form of traveling ionization zones attracted a lot of interest from the fusion research community.
B.04 Guest lecture
COBISS.SI-ID: 30005799