Dr. Matjaž Panjan had an invited lecture at the AVS 65th International Symposium & Exhibition, which took place in Long Beach, USA in October 2018. The invitation came from the general program chair of the conference. The lecture was in a special session called "Future Stars of AVS", where the most promising researchers presented their investigation to the American Vacuum Society. In the lecture "Illuminating physics of magnetron sputtering discharges", dr. Matjaž Panjan presented the results of the described project. He presented the properties of spokes studied in the DCMS and HiPIMS mode, a physical model explaining the self-organization of plasma and the properties of spokes, as well as the influence of spokes on transport and the energy of charged particles in magnetron plasma. The lecture attracted large audience from 2000 participants of the conference.
B.04 Guest lecture
COBISS.SI-ID: 31874087Dr. Matjaž Panjan had an invited lecture at 43rd International Conference on Metallurgical Coatings & Thin Films, (San Diego, USA). In the talk Dr. Panjan reviewed understanding of the ionization zones in magnetron sputtering. He examined processes which govern formation, sustainability, self-organization and dynamics of the ionization zones. He showed that the presence of ionization zones significantly alters spatial distribution of the plasma potential and, as a consequence, causes azimuthal dependence of processes associated with the sustainability of the discharge, including: electron-gas collisions, secondary electron emission and sputtering. Properties of ionization zones and formation of plasma patterns were therefore discussed with respect to these azimuthally non-homogeneous processes. It was also shown that spokes play an important role in the transport of electrons and ions in the magnetron discharges.
B.04 Guest lecture
COBISS.SI-ID: 29478183At the invitation of a research group at Max-Planck Institut für Plasmaphysik (IPP) in Garching (Germany), Dr. Matjaž Panjan had an invited lecture entitled "Magnetron sputtering: Illuminating physics of ionization zones". (https://www.ipp.mpg.de/4160341/archiv-2016). Max-Planck Institut für Plasmaphysik is one of the most renowned institutes for fusion research. High-temperature plasma in fusion reactors is very different from the low-temperature plasma in the magnetrons, but in both plasmas strong turbulences are typically present. Plasma turbulence presents one of the most serious problems for the stability of tokamak plasma and thus for the self-sustainability of fusion reactions. The talk on plasma non-homogeneities in the form of traveling ionization zones attracted a lot of interest from the fusion research community.
B.04 Guest lecture
COBISS.SI-ID: 30005799Doc. dr. Miha Čekada received an invitation to give a lecture at the "17th International Conference on Thin Films" in New Delhi, India. In the talk, he presented the latest findings of the completed project. He explained the physical background for differences in microstructural and morphological properties of thin films prepared by magnetron sputtering and other PVD techniques. He discussed how the ion current density, ion energy, and their spatial distribution influences the microstructure and density of thin films, and focused on the structural irregularities, particularly the growth defects that form during the deposition.
B.04 Guest lecture
COBISS.SI-ID: 30946343Prof. Goran Dražić had a plenary talk at the "26th International Conference on Materials and Technology" in Portorž, Slovenia. In the lecture, he presented some recent results from the structural analysis of selected materials, including thin films produced by magnetron sputtering, using the state-of-the art Cs-corrected scanning transmission electron microscopy. He discussed the influence of the atomic level structure on the material properties, with emphasis on the point defects, planar crystal defects and overall microstructure of the film.
B.04 Guest lecture
COBISS.SI-ID: 6541594