Electrostatic bonding of silicon to glass wafers was investigated in the scope of different Si surface terminations which appear frequently in fabrication of multilayer MEMS structures. In this study, Pyrex 7740 (Corning) and Borofloat 33 (Schott) glass wafers were bonded to bare silicon wafers of (100) crystal orientation. In addition, bonding of glass to thermally grown SiO2 was investigated. Electrostatic bonding was performed in the temperature range 350-400 °C in the air ambient under supplied anodic voltages between 800-1200V. Multilayer structures were successfully bonded by applying appropriate configuration of bonding electrodes.
COBISS.SI-ID: 8653396
An overview of micromachining technologies for the fabrication of silicon microstructures was given. Basic micromachining technologies such as various etching methods of silicon (isotropic, anisotropic; dry, wet) and etching of other important materials (Pyrex glass etc.), anodic bonding, etc. will be discussed. For an illustration of microstructures fabrication by micromachining procedures, a review of microstructures fabricated in LMSE such as micropumps and microreactors, together with their characteristics and applications, will be given.
COBISS.SI-ID: 8473940
Background: Central skull base meningiomas commonly present with visual deficit, and their removal often leads to improvement of visual function. However, the incidence of postoperative visual deterioration has been reportedto be up to 10%. Intraoperative monitoring using flash visual evoked potential has only recently been used with success. Cortical potentials (CP) after electrical epidural stimulation of the optic nerve (ON) were correlated with ON manipulation due to central skull base tumor removal to contribute to improvement of the intraoperative monitoring of the visual function. Methods: Blunt needle stimulating electrodes were attached epidurally alongside ON in an unroofed optic canal and used for delivering a rectangular current pulse (intensity 0.2-5.0 mA; duration 0.1-0.3 ms; rate 2 Hz). CPs after electrical epidural stimulation of ON were recorded with corkscrew electrodes at O(z) with the reference electrode at F(z). Results: P20 and N30 amplitudes were significantly lower (p ( 0.05) during tumor removal associated with ON manipulation than in other phases of surgery; the amplitude reductions were reversible in all cases. There were no significant changes in P20, N30 and P40 latencies during the surgery. Immediate postoperative visual function was unchanged in all patients. Conclusions: P20 and N30 amplitude changes seem to reliably correspond with the manipulation of ON during anterior skull base tumor removal. Reversible reduction of P20 and N30 amplitude was associated with unchanged immediate postoperative visual function. No correlation betweenintraoperative variation of CP and newly acquired postoperative visual deficit can presently be made.
COBISS.SI-ID: 29116633