A detailed overview of activities in LMSE in the field of micromachining of silicon, glass and other compatible materials which are part of modern microelectronic sensor, actuator or/and MEMS structures was given. In addition, applications on various fields using structures designed and fabricated in LMSE were presented.
B.04 Guest lecture
COBISS.SI-ID: 8470100R&D activities in LMSE with the emphasis on their applicability in Slovenian industry were presented. The main emphasis was given to microtechnologies in the field of MEMS, which add value to advanced microstructures, sensors and actuators.
D.10 Educational activities
COBISS.SI-ID: 11767835