To produce cavities in LTCC structures, we used a new material that has not yet been used for such purposes. The advantage of the new temporary fugitive materials is that do not react with the LTCC material at firing temperature and it can be very easily removed from cavities after firing. The temporary fugitive material is useful for producing cavities with extreme diameter and very thin diaphragm as a ceiling of the cavity.
F.33 Slovenian patent
COBISS.SI-ID: 24833319The influence of firing conditions on mechanical properties of LTCC material was studied. The biaxial flexural strength of LTCC material was measured for samples fired at different temperatures for various periods of time. The ball on three balls method was used for biaxial flexural strength testing. At the low firing temperature the material was still porous and the biaxial flexural strength was low. A higher biaxial flexural strength was reached at firing at longer time or higher temperature due to low porosity. Mechanical properties were correlated with phase composition of fired sample.
B.03 Paper at an international scientific conference
COBISS.SI-ID: 23947559Thin and narrow conductive lines on LTCC ceramics was processed by inkjet printing. Quality of printing lines was correlated with printing conditions. At optimal printing conditions narrow conductive lines between resistors and conductive pads were produced.
B.03 Paper at an international scientific conference
COBISS.SI-ID: 25085223In the paper discusses stability issue of a piezoresistive LTCC-based pressure sensor which was designed for measurements in a low-pressure range below 100 mbar. The intrinsic stability of the sensor’s offset was evaluated at the constant ambient temperature and different conditions regarding the atmospheric humidity. The sensors were also subjected to functional fatigue tests which included a full-scale and an overload pressure cycling. Nevertheless, the stability of the key characteristics of the prototype sensors was found still satisfactory for the accurate measurements in the low pressure ranges.
B.03 Paper at an international scientific conference
COBISS.SI-ID: 25795623In the paper the design considerations of the ceramic piezoresistive pressure sensing element and some examples of LTCC-based ceramic pressure sensors were presented. Several demonstrators of LTCC-based ceramic pressure sensors were designed and fabricated for different applications and different pressure ranges (from 0-5 kPa to 0-5 MPa).
B.03 Paper at an international scientific conference
COBISS.SI-ID: 26117159