Implementation of a novel digital temperature compensation method to the field of capacitive sensors is presented. Possibilities for the compensation of sensor parameters such as sensor nonlinearity and temperature sensitivity are analyzed. In order to achieve effective compensation and linearization, a two-dimensional rational polynomial description and Chisholm approximants were investigated. Evaluation results of sensor response are compared against reference pressure source and most effective digital temperature compensation is proposed.
COBISS.SI-ID: 7814740
A capacitive pressure sensor, fabricated using low-temperature cofired ceramic (LTCC) materials and technology was considered for an application in a wireless sensor system. A sesnsor characterization system with the corresponding software for an evaluation of the sensor’s nonlinearity and temperature sensitivity is presented. The digital temperature compensation was performed with a two-dimensional rational polynominal approximation, resulting in a less than 0,4% FS temperature error in the range 10 to 75°C.
COBISS.SI-ID: 23802151