Design, fabrication and characterization of thin film Pt/Ti resistive heater on Si platform is presented. Design guidelines are discussed in detail, followed by description of fabrication process steps and characterization setup. Thin film Pt/Ti heater on Si platform was fabricated by a combination of lift-off process, DC sputter deposition method and thermal annealing of deposited layers. It was found that fabrication process has significant impact on electrical properties the heater, which also explains the discrepancies between calculated and measured values obtained during this work.
COBISS.SI-ID: 7136852
Implementation of a novel digital temperature compensation method for capacitive pressure sensors was presented. Possibilities for the compensation of sensor parameters such as sensor nonlinearity and temperature sensitivity were analyzed. Different approaches to digital descriptions of sensor characteristic were investigated and reported, such as two-dimensional rational polynomial description and Chisholm approximants. Evaluation results are compared against reference pressure source and most effective digital temperature compensation were proposed.
COBISS.SI-ID: 7243348