Black silicon (BS) is modified highly textures silicon surface with high aspect ratio of microstructures. Typical density of microstructures is 106 mm-2 and height from few 100 nm to 10 µm. BS is in MEMS most often made by RIE process, where for the mask could be used high resolution lithography, lithography with nano-micro- particles or RIE process without the use of mask (maskless process). In this work, several applications of BS were presented. The emphasis was on the developed maskless process, where BS was applied for the fabrication of microcobustor.
F.18 Transfer of new know-how to direct users (seminars, fora, conferences)
COBISS.SI-ID: 7279444A review of recent research activities in LMSE on micro/nano technologies and structures with emphasis on silicon micromachining, for microsensors, microactuators, microreactors and other microstructures was given. Latest results were reported and discussed. Possible topics for cooperation were several potential users identified.
F.18 Transfer of new know-how to direct users (seminars, fora, conferences)
COBISS.SI-ID: 7279700