The first part of the presentation provides overview of some important micromachining processes and related microstructures which are constitutional structures used for sensing and actuating. The limitations of certain technological approaches are discussed and explained.The second part of the presentation is dedicated to thin film Ti/Pt temperature sensors and microheaters with emphasis on microstructural properties, which affect the electrical resistance. Characterization methods are presented for extraction of TCR and dependency on the thermal annealing parameters. The fabrication process steps provide insight into the integration of temperature sensors and heater on Si platform for microreactor applications. Last part of the presentation focuses on the piezoresistive pressure sensor structure, giving detailed analysis of membrane fabrication process and important mechanical stress issues regarding the thin film deposited layers on the membrane.
B.04 Guest lecture
COBISS.SI-ID: 9562708R&D activities in LMSE with the emphasis on their applicability in Slovenian industry were presented. The main emphasis was given to microtechnologies in the field of MEMS, which add value to advanced microstructures, sensors and actuators.
F.18 Transfer of new know-how to direct users (seminars, fora, conferences)
COBISS.SI-ID: 11767835A detailed overview of activities in LMSE in the field of micromachining of silicon, glass and other compatible materials which are part of modern microelectronic sensor, actuator or/and MEMS structures was given. In addition, applications on various fields using structures designed and fabricated in LMSE were presented.
B.04 Guest lecture
COBISS.SI-ID: 8470100Installation progress Eclipse development environment with the GCC compiler MSP430 and USB-JTAG is primarily intended for students of electrical engineering students and graduates at university and professional studies. Eclipse development environment with the GCC compiler MSP430 and USB-JTAG illustrates material covered by the subject Development of digital systems.
F.17 Transfer of existing technologies, know-how, methods and procedures into practice
COBISS.SI-ID: 7831380Research activities in LMSE on micro/nano structures, related (micro)electronic circuits, smart sensors and electronics, involved in microfluidic applications, were reviewed. Latest results were reported and discussed. Possible topics for cooperation were identified.
B.04 Guest lecture
COBISS.SI-ID: 8105044