SU8, the near-UV photosensitive epoxy-based polymer was used as a sensor layer in the capacitive chemical sensor. It was observed that the response of the sensor slowly increases with the temperature applied in hard-baking process as long as it remains below 300°C. At this temperature the response of the sensor abruptly increases. Fully crosslinked structure of the sensor layer becomes opened and disordered when the sensor is hard-baked at temperatures between 300°C and 320°C. These changes in chemical structure were analyzed by Fourier-transform infrared spectroscopy.
COBISS.SI-ID: 4060442
A conductive photoresist for photolithographic application was studied. The negative near-UV sensitive epoxy-based photoresist was used as a polymer matrix and conductive carbon black was used as functional filler. Composites with better dispersed particles have lower resistivities. This effect remained below one order of magnitude and decreased after UV-exposure. The composites with carbon black concentration of up to 1.1 vol.% are suitable for spin-coating and photolithography.
COBISS.SI-ID: 4191002
A high precision optical scanner, combining averaged optical sensors array with appropriate 10um graduated scales on measurement - fix plate and Vernier sliced parallel scale on reading plate is presented. The generated sine wave signals are at least 30dB less distorted by distributing and mismatching optical edges over a number of sine wave periods within a number of Vernier scaled periods. Good matching was found between mathematically analyzed optical scanner and measurement results.
COBISS.SI-ID: 7187028
Electromagnetic compatibility (EMC) studies the unintentional generation, propagation and reception of electromagnetic energy with reference to the unwanted effects. Its goal is to avoid any interference between different equipment, which uses electromagnetic phenomena, in the same electromagnetic environment. This article is focused on EMC of integrated circuits.
COBISS.SI-ID: 7186516
The article presents part of the design methodology, modeling and efficient simulations of high performance micro-electromechanical ?? modulator. The method is based on converting continuous-time model of the MEMS sensor and eventual analog loop filter into discrete time equivalent using impulse invariant transformation. The methodology is valid for any “MEMS based cantilever” sensor operating in a closed loop. Using proposed methodology makes possible to efficiently design, predict the behavior and stability of the loop and perform efficient system level simulations.
COBISS.SI-ID: 7301972