The first part of the invited lecture provides overview of some important micromachining processes and related microstructures which are constitutional structures used for sensing and actuating. The limitations of certain technological approaches are discussed and explained.The second part of the presentation is dedicated to thin film Ti/Pt temperature sensors and microheaters with emphasis on microstructural properties, which affect the electrical resistance. Characterization methods are presented for extraction of TCR and dependency on the thermal annealing parameters. The fabrication process steps provide insight into the integration of temperature sensors and heater on Si platform for microreactor applications. Last part of the presentation focuses on the piezoresistive pressure sensor structure, giving detailed analysis of membrane fabrication process and important mechanical stress issues regarding the thin film deposited layers on the membrane.
B.04 Guest lecture
COBISS.SI-ID: 9562708Presentation of sensor developed for non-invasive sceleton muscles characterisation. Sensor, based on silicon piezoresistors connected into Wheatstone bridge, converts mechanical stresses generated in muscle or tendon into electrical signal.
F.06 Development of a new product
COBISS.SI-ID: 30102489Collection of laboratory exercises for course: Basis of Electrotechnics II
D.10 Educational activities
COBISS.SI-ID: 261436416A modification of microthrottle (MT) pumps by geometry modifications of actuator (piezoelectric), membrane and cavity is proposed. One of the advantages of this approach is possibility of stacking the micropumps in parallel which would make this type of pumps appropriate for complex lab on chip devices, requiring simultaneous and separate pumping of several liquids. As a strong support in micropumps design and fabrication, a complete electro–fluid–solid mechanics coupling model for numerical simulation of strip type piezoelectric micro pump has been developed using finite element analysis software COMSOL Multiphysics V4.2. Numerical simulations revealed that although during one period of sinusoidal excitation period the pumped liquid volume is flowing in both directions, the net fluid volume at output after one period is non-zero (positive), resulting in successful fluid pumping. Fabricated prototype micropumps confirmed this conclusion.
F.18 Transfer of new know-how to direct users (seminars, fora, conferences)
COBISS.SI-ID: 9419092The paper reports on investigations of transdermal drug delivery system, based on silicon injector chip with silicon microneedles and PZT actuated micropump, for drug delivery such as insulin. First, basic skin properties and dosing requirements are reviewed. Next, the whole system and its basic components (injector chip, micropump, drug container) are discussed. Based on this, microneedle injector chip design and fabrication is proposed and realized. Following is the design and fabrication of PZT actuated micropump and fluidic parameters evaluation of fabricated micropumps. Basic requirements for drug container, control electronics and power supply parameters are presented next. Finally, maximum drug liquid flow, based on measured prototype micropump parameters, through the prototype injector chip is determined.
F.18 Transfer of new know-how to direct users (seminars, fora, conferences)
COBISS.SI-ID: 9524820