An overview of micromachining technologies for the fabrication of silicon microstructures was given. Basic micromachining technologies such as various etching methods of silicon (isotropic, anisotropic; dry, wet) and etching of other important materials (Pyrex glass etc.), anodic bonding, etc. was discussed. For an illustration of microstructures fabrication by micromachining procedures, a review of microstructures fabricated in LMSE such as micropumps and microreactors, together with their characteristics and applications, was given.
B.04 Guest lecture
COBISS.SI-ID: 8473940R&D activities in LMSE with the emphasis on their applicability in Slovenian industry as well as in Slovenian craft activities were presented. The main stress was given on advanced technologies from the field of MEMS, which add values to modern microstructures, sensors and actuators.
F.18 Transfer of new know-how to direct users (seminars, fora, conferences)
COBISS.SI-ID: 11767835A detailed overview of activities in LMSE in the field of micromachining of silicon, glass and other compatible materials which are part of modern microelectronic sensor, actuator or/and MEMS structures was given. In addition, applications from various fields using structures designed in LMSE were presented.
F.18 Transfer of new know-how to direct users (seminars, fora, conferences)
COBISS.SI-ID: 8470100