The results of the experimental study of the temperature behaviours of the capacitive pressure sensor made in LTCC technology were presented. It was shown that the sensor’s temperature characteristics are influenced mainly by the sensor’s structure geometry and the temperature coefficient of the elastic properties of LTCC, while the coefficients of temperature expansion and the temperature coefficient of the Poisson’s ratio have only a minor effect. However, there are important influence of the technological process induced residual stresses and the intrinsic curvature of the diaphragm.
COBISS.SI-ID: 22591783
Three different types of ceramic pressure sensors (capacitive sensor, piezoelectric resonant sensor and piezoresistive sensor) were analysed for the possibility of using in low-energy-consumption applications. The design issues for low energy consumption of the pressure sensors made in 3D LTCC structure with circular edge-clamped diaphragm and the appropriate thick-film sensing elements were discussed and the sensors’ characteristics compared.
COBISS.SI-ID: 22809127