An LTCC based capacitive pressure sensor with the frequency output was designed for measuring pressures in the range up to 100 kPa. The 3D LTCC structure of the sensing element was made of DP951 tape, with the diaphragm with the diameter of 9 mm and the thickness of 200 µm and the air gap between the electrodes of about 70 µm, resulting in the initial capacitance of around 10 pF. The sensitivities achieved were between 2.5 and 3.5 Hz/kPa. The technology and the characterisation of the test sensors were presented.
COBISS.SI-ID: 22031399
Benchmarking of three different diaphragm-type ceramic pressure sensors, namely piezoresistive, piezoelectric resonance and capacitive sensors was presented from point of view of low energy consumption of the sensing elements.
COBISS.SI-ID: 22021927