The temperature behaviour of the capacitive pressure sensor made using LTCC technology was investigated. It was shown that the main influence on the sensor’s temperature characteristics are from the sensor’s structure geometry and the temperature coefficient of the elastic properties of the LTCC, while the coefficients of temperature expansion and the temperature coefficient of the Poisson’s ratio have only a minor effect. However, there are also important influences of the manufacturing-process-induced residual stresses and the curvature of the diaphragm.
COBISS.SI-ID: 7568212
A capacitive pressure sensor was realized by using low-temperature co-fired ceramic materials and technology and then characterized. The design of the sensing element in the 3D LTCC structure with the cavity was considered with the aim to improve the sensor's characteristics. Special points of attention were the linearity, the temperature behaviour, the pressure media and the behaviour of the reference pressure medium.
COBISS.SI-ID: 22942247
A novel digital temperature compensation method originally developed for piezoresistive pressure sensors for capacitive sensors was implemented for the compensation of the capacitive sensors’ parameters, such as the sensor nonlinearity and the temperature sensitivity. Different approaches to digital descriptions of the sensor characteristics are investigated and reported, such as two-dimensional rational polynomial description and the Chisholm approximants.
COBISS.SI-ID: 7814740
A capacitive pressure sensor, fabricated using LTCC materials and technology, was considered for applications in which a low power consumption is required. Readout electronics based on a capacitance-to-digital conversion were realised by using an AD7746. The typical characteristics obtained were as follows: a sensitivity of 1.7 fF/mbar, a temperature dependence of 9 fF/°C and a temp. dependence of the sensitivity of < 2 aF/mbar/°C. With the digital temperature compensation (two-dimensional rational polynomial approximation), a less than 0.4% FS error was achieved for the range 10-75 °C
COBISS.SI-ID: 23802151
Three different types of ceramic pressure sensors (capacitive sensor, piezoelectric resonant sensor and piezoresistive sensor) were analysed for possible use in low-energy-consumption applications. The design issues for the low energy consumption of the pressure sensors made in a 3D LTCC structure with a circular edge-clamped diaphragm and the appropriate thick-film sensing elements were discussed and the sensors’ characteristics were compared.
COBISS.SI-ID: 22809127