We are in the phase of development of the technological procedure for producing 3D LTCC structures with buried air gaps under the thin diaphragm which is essential for capacitive sensor. The influence of the technological parameters and the structure geometry to the sensors characteristics were analysed. Feasibility of the piezoresistive pressure sensors with the ultra-power consumption (< 0.05 mW) was also considered. The report contains some confidential data which are of interest for the industrial partner HYB d.o.o. and so are not accessible in the open literature.
F.09 Development of a new technological process or technology
COBISS.SI-ID: 23549223The stability of the capacitive ceramic sensor for measuring air pressure depends on the stability of the capacitive sensing structure and the accuracy of the electronics for signal processing. The tests performed on the prototype sensors showed the stability of the zero-pressure output within the accuracy region for the AD7746 capacitance to digital converter.
F.08 Development and manufacture of a prototype
COBISS.SI-ID: 23337255