Fe-Si with surface active Se was sputtered at different parameters and morphology changes were analyzed. Each grain behaves as a single crystal and many grains of different orientations can be sputtered simultaneously. For the analysis an AFM was used. Surface structures of different types, dependent on grain orientation, up to several 100 nm in length, were observed. Surface roughness changes were measured. Instead of ripples, characteristic for amorphous materials facet-like formations due to surface active element and sputtering were observed.
B.03 Paper at an international scientific conference
COBISS.SI-ID: 746410Fe-Si with surface active Se was sputtered at different parameters and morphology changes were analyzed. Each grain behaves as a single crystal and many grains of different orientations can be sputtered simultaneously. For the analysis an AFM was used. Differerrent types of surface structures, dependent on grain orientation, with characteristic length of up to several 100 nm were observed. Instead of ripples, characteristic for amorphous materials facet-like formations that can be ascribed to Se influence were observed.
B.03 Paper at an international scientific conference
COBISS.SI-ID: 736426