Ceramic pressure sensors designed for measuring low pressures up to few 10 kPa were investigated. The prototype sensors based on the piezoresistive and the capacitive principles were made in the LTCC structures with the different dimensions (thickness of the diaphragm of 200 µm and 100 µm, and the diameters of 25, 16, and 8 mm) and characterised. The laboratory-scale prototype testing showed the characteristics to be favourable for possible future applications (the sensitivity of about 500 µV/V/kPa was obtained for the piezoresistive and of 20 fF/kPa for the capacitive sensors).
COBISS.SI-ID: 22941735
Stability of an LTCC-based piezoresistive sensor designed for the measurement of air pressures lower than 3 kPa was investigated. A series of test sensors was manufactured and characterised. Among the experimental tests the numerical analyses were included to show the trends and help reveal the impact of some of the design parameters. The essential sensor characteristics, i.e., the sensitivity, the warm-up drift and the offset-voltage stability are discussed. The results presented are good basis for the future development of the new commercial products.
COBISS.SI-ID: 23364135