A procedure for characterising lead-zirconate-titanate thick films on pre-fired LTCC substrates performed in order to determine the material parameters for numerical modelling was presented. Due to the lack of standard procedures for measuring the elastic and piezoelectric properties of the films, the compliance was evaluated from the results of nano-indentation tests, and a substrate-flexure method was used to evaluate the transverse piezoelectric coefficients. The validation of the model and the results of finite-element analysis of the test structures are discussed.
COBISS.SI-ID: 21287719
The paper discusses the feasibility of a piezoelectric resonant pressure sensor made of lead-zirconate-titanate (PZT) thick films on a preprocessed three-dimensional LTCC structure with a deformable diaphragm. Numerical and experimental analyses were carried out. By using experimentally evaluated material properties, a finite-element analysis showed the trends and facilitated the decisions in the design phase of the sensor.
COBISS.SI-ID: 21688615