The paper discusses the feasibility of a piezoelectric resonant pressure sensor made of lead-zirconate-titanate (PZT) thick films on a preprocessed three-dimensional LTCC structure with a deformable diaphragm. Numerical and experimental analyses were carried out. By using experimentally evaluated material properties, a finite-element analysis showed the trends and facilitated the decisions in the design phase of the sensor.
COBISS.SI-ID: 21688615
PZT thick-film structures on pre-fired LTCC substrates were studied for possible implementation in ceramic pressure sensors. Special attention was paid to the evaluation of the material parameters for numerical models and the model validation. An example of a resonance pressure sensor with a PZT thick-film actuator structure on the diaphragm was presented.
COBISS.SI-ID: 21175079
A procedure for characterising lead-zirconate-titanate (PZT) thick films on pre-fired LTCC substrates aimed at an evaluation of the material parameters for numerical modelling was presented. Due to the lack of standard procedures for measuring the elastic and piezoelectric properties of the films, the compliance was evaluated from the results of nano-indentation tests, and a substrate-flexure method was used to evaluate the transverse piezoelectric coefficients. The validation of the model and the results of the finite-element analysis of the test structures are discussed.
COBISS.SI-ID: 21287719
The microstructural, electrical and piezoelectric characteristics of the PZT thick films on prefired LTCC tapes and relatively inert alumina substrates were studied. To minimise the influence of the substrate-film interactions, different electrode materials and the use of an additional intermediate layer as a barrier were evaluated. The dielectric permittivities, dielectric losses, and piezoelectric coefficients were measured and compared.
COBISS.SI-ID: 22677031
The stability of an LTCC-based piezoresistive sensor designed for the measurement of air pressures lower than 3 kPa was investigated. A series of test sensors was manufactured and characterised. Among the experimental tests the numerical analyses were included to show the trends and help reveal the impact of some of the design parameters. The essential sensor characteristics, i.e., the sensitivity, the warm-up drift and the offset-voltage stability, are discussed. The results presented are a good basis for the future development of the new, commercial products.
COBISS.SI-ID: 23364135