Feasibility of a piezoelectric resonant pressure sensor made of lead-zirconate-titanate (PZT) thick films on a preprocessed three-dimensional LTCC structure with a deformable diaphragm. Numerical and experimental analyses were carried out. Two different thick-film PZT compositions were characterised. By using experimentally evaluated material properties, a finite-element analysis showed the trends and facilitated the decisions in the design phase of the sensor.
F.02 Acquisition of new scientific knowledge
COBISS.SI-ID: 21688103A piezoelectric resonant pressure sensor was considered as a promising candidate for application in the low-pressure range. Based on the results of the finite element (FE) analysis, the geometry of the sensor was optimised. Some critical design parameters were discussed such as stability, ageing, and spurious vibrations and related package issues.
F.08 Development and manufacture of a prototype
COBISS.SI-ID: 22030887