Feasibility of a piezoelectric resonant pressure sensor made of lead-zirconate-titanate (PZT) thick films on a pre-processed three-dimensional LTCC structure with a deformable diaphragm. Numerical and experimental analyses were carried out. Two different thick-film PZT compositions were characterised. By using experimentally evaluated material properties, a finite-element analysis showed the trends and facilitated the decisions in the design phase of the sensor.
F.02 Acquisition of new scientific knowledge
COBISS.SI-ID: 21688103A piezoelectric resonant pressure sensor was considered as a promising candidate for applications in the low-pressure range. Based on the results of the finite-element (FE) analysis, the geometry of the sensor was optimised. Some critical design parameters were discussed such as stability, ageing, and spurious vibrations and related package issues.
F.08 Development and manufacture of a prototype
COBISS.SI-ID: 22030887Ceramic pressure sensors designed for measuring low pressures up to a few 10 kPa were investigated. The prototype sensors based on the piezoresistive and the capacitive principles were made in the LTCC structures with different dimensions (thickness of the diaphragm of 200 µm and 100 µm, and the diameters of 25, 16, and 8 mm) and characterised. The laboratory-scale prototype testing showed the characteristics to be favourable for possible future applications (a sensitivity of about 500 µV/V/kPa was obtained for the piezoresistive and of 20 fF/kPa for the capacitive sensors).
B.03 Paper at an international scientific conference
COBISS.SI-ID: 22941735The results of the numerical analyses and prototype testing of a piezoresistive LTCC-based low-pressure sensor for a pressure below 3 kPa were presented. The sensors were designed to meet the demands for a potential product of our industrial partner. The results of the numerical and experimental analyses, and prototype testing (including long-term stability and fatigue tests) confirmed the appropriateness of the sensor for application in the low pressure range.
F.08 Development and manufacture of a prototype
COBISS.SI-ID: 22942503During the development of LTCC-based piezoresistive pressure sensors and the appropriate manufacturing process for large-scale production, special attention has to be paid to specific, critical steps. In this paper the most critical steps in the manufacturing of a pressure sensor designed to meet the characteristics relating to the AAMI and ICE standards are discussed.
F.06 Development of a new product
COBISS.SI-ID: 24081703