Piezoelectric thick films based on Pb(Zr,Ti)O3 (PZT) were prepared on different types of LTCC and on relatively inert alumina substrates. The results obtained with the alumina were used as a reference. The dielectric and piezoelectric characteristics of the PZT fired on the LTCC substrates deteriorated in comparison to the samples on alumina, due to interactions between the LTCC substrate and the PZT layer.
COBISS.SI-ID: 21623847