The thick-film temperature sensors were screen-printed and fired on alumina and LTCC substrates. . Micro structural investigations of cross-sections of thermistors on LTCC substrates indicate significant interactions between glassy LTCC substrates and films. The sheet resistivities, temperature coefficients of resistivity and noise indices of the thermistors fired on LTCC substrates as compared to films fired on alumina significantly increased. These results must be taken into consideration when designing thick film temperature sensors in LTCC structures.
B.03 Paper at an international scientific conference
COBISS.SI-ID: 21793831To obtain buried structures iwith LTCC technology sacrificial layers are often used. The sacrificial material based on graphite, either pastes or tapes were evaluated. The thermo gravimetrical analysis (TGA) was used to establish the starting temperatures of oxidation and burn-out profiles. Some preliminary results obtained with test structures for buried cavities in 3D LTCC structures are presented
B.03 Paper at an international scientific conference
COBISS.SI-ID: 22022439