Characteristics of a large plasma reactor suitable for deposition of silica-like coatings were determined. The vacuum parameters were evaluated and the parameters significant for the deposition kinetics estimated. In particular, we disclosed the pumping kinetics and estimated the gas residence time, which has, according to our hypothesis, the crucial role in deposition kinetics. Preliminary tests on the deposition efficiency were performed and explained, taking into account the properties of gaseous plasma in this industrial reactor.
COBISS.SI-ID: 32737319