Projects / Programmes
Pb(Sc0.5Nb0.5)O3–PbTiO3 thick films for sensor and actuator applications
| Code |
Science |
Field |
Subfield |
| 2.09.06 |
Engineering sciences and technologies |
Electronic components and technologies |
Characterisation of electronic components and materials |
| Code |
Science |
Field |
| T153 |
Technological sciences |
Ceramic materials and powders |
| Code |
Science |
Field |
| 2.02 |
Engineering and Technology |
Electrical engineering, Electronic engineering, Information engineering |
piezoelectric thick films, thermal stress, an actuator, a pump for insulin
Researchers (1)
| no. |
Code |
Name and surname |
Research area |
Role |
Period |
No. of publicationsNo. of publications |
| 1. |
26468 |
PhD Hana Uršič Nemevšek |
Electronic components and technologies |
Head |
2011 - 2013 |
0 |
Organisations (1)
| no. |
Code |
Research organisation |
City |
Registration number |
No. of publicationsNo. of publications |
| 1. |
0106 |
Jožef Stefan Institute |
Ljubljana |
5051606000 |
18 |
Abstract
There is a large potential to use the piezoelectric thick films, for example in integrated in micro-electromechanical systems (MEMS), however due to the rapid development of microelectronics, the piezoelectric thick films for MEMS are expected to have excellent required properties for specific applications. H. Uršič demonstrated during her Ph. D. that the properties of Pb(Mg1/3Nb2/3)O3–PbTiO3 (PMN–PT) thick films can be modified by applying the thermal stresses to them. With the proper selection of the substrate material it is possible to apply either compressive or tensile thermal stresses to the thick-film layers during a thermal treatment of structures. In this way it is possible to modify the structural and electrical properties of thick films (i.e., microstructure, phase composition, dielectric, ferroelectric and piezoelectric properties) and to prepare the films with desired properties for specific application.
The first part of the proposed research project is a continuation of the research within the doctoral study, where the influences of the thermal stresses on the properties of thick-films were investigated. The new findings that the structural and electrical properties of thick films can be modified by thermal residual stresses will be used to prepare dense Pb(Sc1/2Nb1/2)O3–PbTiO3 (PSN–PT) thick-films with good functional properties for sensor/actuator structures. This would be an added value to world-science, while PSN–PT thick films were not jet reported in the literature. In the frame of this project, the Pb(Zr,Ti)O3 (PZT) thick-film structures will be also studied with the aim to obtain deeper understanding of the influence of thermal stresses on the properties of thick films. In contrast to PSN–PT thick films, which are not yet reported, the PZT thick films have been investigated before and are already published in the literature. However, no systematic studies on the influence of the thermal stresses to the properties of PZT thick films were made till now. The aim of this project is to understand the influence of thermal stresses on the properties of PSN–PT and PZT thick films, and consequently to prepare PSN–PT and PZT thick films with desired properties for further use in sensor or actuator structures.
The aim of the proposed research project is also to prepare PSN–PT/Pt thick-film actuators and to perform experiments for integration of these actuators into the pumps for pumping an insulin for the treatment of diabetic patients (further called insulin pumps). The PSN–PT/Pt actuators will be processed by a special new procedure, which will be similar as the procedure for the preparation of PMN–PT/Pt thick-film actuators (H. Uršič et al., Sensors Actuat. B, 2008). We expect that the normalized displacement of the PSN–PT/Pt actuators will be even larger than the normalized displacement of the PMN–PT/Pt actuators from our previous work, due to a high piezoelectric coefficient d31 of PSN–PT material. Hence we will try to integrate the PSN–PT/Pt and PZT thick-film structures into the insulin pumps, which are planned to be developed by the company HYB Proizvodnja hibridnih vezij d.o.o. (cofounding organisation of the project).
Significance for science
In the frame of this project we published four scientific articles in the scientific journals with the impact factor higher than 1.4. Three of these articles were published in the journal, which is the first in the field of ceramic materials (i.e., J. Eur. Ceram. Soc.). Additionally, we have published a scientific contribution at the International Conference Devices and Materials & the Workshop on Ceramic Microsystems 2012. Furthermore, we have presented 6 papers at the international conferences and invited talk on thick layers of PSN-PT and PZT at the University of Physics (Alexandru Ioan Cuza University of Iasi), Romania. The results of the research project have promoted the progress in the development of piezoceramic powder, thick films and ceramics all the way to the development of new sensor/actuator structures. Within the project also the basic understanding of the processes in thick-film layers were developed and promoted. Most of the results are new and therefore the original contributions to science, particularly in the area of "electronic components and technologies." The introduction of PSN–PT material in the field of piezoelectric actuators for driving micropumps will enable excitation of pumps with lower electric fields and the use of simpler, less powerful and less expensive control circuits. This will increase the security of the user wearable integrated microfluidic systems, such as one for insulin.
Significance for the country
The biggest impact of the research achievements of this project is in the area of electronic components. Successful design, development and manufacture of two demonstration products place the applicability of the technology and materials into the 4th technology readiness level (TRL). These demonstrators are the micro-pump and resonant pressure sensor. Activity within the project was highly multi-disciplinary. The added value of the project for the Slovenian economy is visible in collaboration of Slovenian as well as European research institutions with Slovenian companies. We collaborate with: • scientific laboratories in the Europe; Centre Européen de la Céramique, Limoges Cedex, France and Institut für Struktur- und Funktionskeramik, Leoben, Austria. • scientific laboratories in Slovenia; Laboratory of Microsensor Structures and Electronics, Faculty of Electrical Engineering, University of Ljubljana and Condensed Matter Physics department at Jožef Stefan Institute and • three Slovenian companies; HYB d.o.o., Šentjernej (who was also a co-funding organisation within the first 18 months of the project), HIPOT-RR d.o.o., Otočec and KEKON d.o.o., Žužemberk. In our opinion the most important achievement within the project is in the strategic objective of setting up the value chain, from basic research to demonstration product. On the other hand, the project is starting a new chain of knowledge from processing and characterization of functional materials to the microsensor and microactuator structures.
Most important scientific results
Annual report
2012,
final report,
complete report on dLib.si
Most important socioeconomically and culturally relevant results
Annual report
2012,
final report,
complete report on dLib.si
