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Projects / Programmes source: ARIS

Textured ceramic films for sensors and actuators

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Research activity

Code Science Field Subfield
2.09.01  Engineering sciences and technologies  Electronic components and technologies  Materials for electronic components 

Code Science Field
T153  Technological sciences  Ceramic materials and powders 

Code Science Field
2.02  Engineering and Technology  Electrical engineering, Electronic engineering, Information engineering 
Keywords
piezoelectrics, thick films, texture, processing, characterisation, pressure sensor, medical transducer
Evaluation (rules)
source: COBISS
Evaluation of bibliographic research performance indicators according to ARIS methodology
Citations Citations for bibliographic records in COBIB.SI that are linked to records in citation databases
source: WoS source: Scopus source: COBISS
Researchers (11)
no. Code Name and surname Research area Role Period No. of publications
1.  08346  Darko Belavič  Electronic components and technologies  Researcher  2010 - 2013  682 
2.  19038  PhD Andreja Benčan Golob  Materials science and technology  Researcher  2010 - 2013  535 
3.  03219  PhD Marko Hrovat  Materials science and technology  Researcher  2010 - 2013  712 
4.  30036  Brigita Kmet    Technical associate  2010 - 2013  168 
5.  02627  PhD Marija Kosec  Electronic components and technologies  Researcher  2010 - 2012  1,494 
6.  31064  PhD Alja Kupec  Mechanical design  Junior researcher  2010 - 2013  87 
7.  10124  PhD Zdravko Kutnjak  Physics  Researcher  2010 - 2013  777 
8.  02572  Srečo Maček    Technical associate  2010  144 
9.  24272  PhD Tadej Rojac  Electronic components and technologies  Head  2010 - 2013  597 
10.  27820  Tina Ručigaj Korošec    Technical associate  2010 - 2013  0 
11.  26468  PhD Hana Uršič Nemevšek  Electronic components and technologies  Researcher  2010 - 2013  658 
Organisations (1)
no. Code Research organisation City Registration number No. of publications
1.  0106  Jožef Stefan Institute  Ljubljana  5051606000  91,094 
Abstract
There is a need for highly efficient piezoelectric thick films to be integrated in MEMS as sensors, actuators, transducers etc.   In addition to increase efficiency there is increase interest for lead free piezoelectric thick films. The proposed project aims to couple both problems. The efficiency of piezoelectric will try to be enhanced by texturing of films. It is new approach. To our best knowledge the research on this topic has not been performed yet. Following the positive results of texturing of Pb(Mg1/3Nb2/3)O3-PbTiO3 (PMN-PT) bulk ceramics by TGG or RTGG the same principle will be used for creating texture in thick film. It is realistic to expect the proper orientation of plates – templates due to shear stress under knife in doctor baled tape casting will also happen due to shear stress when squeezing ink through screen during screen printing. Due to are very positive results of texturing of bulk PMN-PT closed to morphotropic phase boundary (MPB) and relatively good results in non textured thick films the first system to be investigated will be PMN-PT closed to MPB. We know enough about powder processing, we know how to make dense thick films and we know how to get templates. The experiences we gain in processing of lead containing piezoelectric thick films will be used in processing of textured lead free piezoelectric thick films. Again we developed a method to make high quality powder of K0.5Na0.5NbO3 (KNN) based materials. We would also like to exploit recently developed KNN composition with the additives that form liquid phase during sintering that is necessary to get densification under constrain condition. KNN ceramic is characterized by exaggerated grain growth that leads to grains of several 10 to 100 micrometers. These grains will be let loose by etching with acid and further use as templates for texturing. Since the particles during solid state synthesis in KNN system show the tendency to grow in facet shape, one may expect certain orientation of particles during printing and finally self texturing. The other way will be detail investigation of powder synthesis to find condition for growth of both type of particles small cubes-templates and well rounded particles, mix them together and use for screen printing and sintering.   Both films will be made on alumina substrates. Processing will follow extensive structural investigation: phase composition, density and texture and functional properties measurement like dielectric, piezoelectric and electrostrictive properties. The last part of the project will be on designing and characterization of two demonstrators. Textured films will be used for membrane resonant pressure sensor. The experiments will be done together with the industrial partner we collaborated already in development of PZT based resonant pressure sensor. The second demonstrator we intend to make using textured films is integrated high frequency medical transducer. These will be done with our traditional partner from University Tours. We gain common experiences in developing first integrated high frequency transducer for medical application. We expect new knowledge in understanding of processing of textured layers under constrain conditions. We further expect to get relation between texture and functional properties of films. We are particularly interesting in possible self texturing of lead free piezoelectrics. The results will be also useful for Slovene industry producing pressure sensors.
Significance for science
The results of the project represent a significant progress in the field of efficient piezoelectric perovskite materials. For the first time, we proved that is possible to prepare screen-printed ferroelectric Pb(Mg1/3Nb2/3)O3–PbTiO3 (PMN-PT) thick films with the addition of seeds, which are more than 10-times larger than the size of the main powder particles used for screen printing. Moreover, we showed that it is possible to prepare partially textured thick films using the template grain growth (TGG) method. The growth of the grains on the seeds is thus also possible in thick films and not only in ceramics, as reported earlier. In addition, we were able to prepare homogenous thick films by using seeds of the same composition as that of the primary powder particles. Our partially textured films exhibited improved piezoelectric and ferroelectric properties relative to the non-textured films of the same composition. The results are new and thus represent an original contribution to science. Within the project, we studied the domain structure of the PMN-PT thick films. Because the thick films are clamped onto the substrate, compressive stresses are developed in the films during cooling, which greatly affect their domain structure. Such domain structure is thus distinctly different from that in the bulk ceramics (H. Uršič et al., J. Phys. D: Appl. Phys. 45, 2012). The (K,Na)NbO3 (KNN) solid solution is still considered as one of the most promising candidates for the replacement of lead-based perovskites, such as (PZT), in a wide range of applications. Despite the potential of this material for high-frequency ultrasound applications, much less data exist on the KNN thick films as compared to the bulk counterpart. There is also a lack of systematic studies oriented toward the processing of the KNN thick films and its relation to the phase composition, structure and microstructure. Such studies were performed earlier for PZT thick films (Kosec et al., J. Eur Ceram. Soc. 19, 1999, pp. 949-954). The results of the project made possible to significantly progress in the field of KNN thick films. The goal was to relate the processing of the thick films (screen printing) with their properties, as this is the first step to be done in order to obtain good films with reproducible properties. We achieved this goal by performing a systematic analysis of the structure, microstructure and densification of the films as a function of the sintering temperature and the presence/absence of the packing powder during sintering. The same studies led to an interesting observation: the KNN films showed crystallographic orientation along [100]pc and less along [10-1]pc direction. We explained the mechanism of this phenomenon. The orientation is a result of compressive thermal stresses, which are generated in the films as a consequence of the mismatch between the thermal expansion coefficients of the film and the substrate (Pavlič et al., J. Eur. Ceram. Soc. 37, 2014, 285-295). This opened up a possibility to control the orientation of the films by selection of the substrate, which we subsequently confirmed. Within a detailed study of the piezoelectric properties of the KNN thick films we found that the reduction of the piezoelectric d33 coefficient of the KNN films relative to the KNN ceramics, i.e., 50%, is much smaller as compared to that in other lead-based thick films where the reduction of d33 may reach 70-80%. Based on an extensive literature review on a wide range of materials we finally concluded that this small reduction of d33 is related to the specific elastic properties of the KNN. This general finding provides an even greater potential for the application of KNN thick films, as the piezoelectric response of KNN is less susceptive to the substrate clamping in comparison to PZT or PMN-PT (J. Pavlič et al., J Am Ceram Soc, 2014, accepted, DOI: 10.1111/jace.12797).
Significance for the country
The research project gained not only scientific results, but also social-economic results on various levels. Within the project we evaluated the possibility to integrate two most promising piezoelectric materials, i.e., Pb(Mg1/3Nb2/3)O3–PbTiO3 (PMN-PT) and (K,Na)NbO3 (KNN), into complex thick-film structures. We thus gained new knowledge on the integration of these materials into specific sensor, actuator and transducer elements, such as the pressure resonance sensor and ultrasound (US) transducer. This topic requires further applicative research and it is of interest for several companies (HIDRIA, HIPOT-RR, HYB, IN.MEDICA, KEKON, KEKO Oprema) and research groups from the field of electronic components, microelectronics and microsystems. The results of the project were used in the Center of Excellence NAMASTE. CO NAMASTE is a multidisciplinary and transdisciplinary consortium of different research and industrial organizations. The center gathers 10 research teams, 3 private research organizations and a wide range of different technologically advanced companies from Slovenia. The partners involved span from very different regions in Slovenia. The results of this project were also used in the center for development IN.Medica. This center, which was found in 2011 and it is located in the south-eastern Slovenian region, operates in the industrial field of pharmacy and biotechnology. The dissemination of the project results contributed to the reputation of the Slovenian research institutions in the European research area. On this basis, our research institution was invited in a 7FP EU project CERAMPOL (FP7-280995-2; “Ceramic and polymeric membrane for water purification of heavy metal and hazardous organic compound”). The project is currently under way. In addition to our research institution, a Slovenian company is also involved in this project. The Slovenian partners are responsible for the development of a vibration system for cleaning of ceramic membranes, which are contaminated from industrial waste-water. The vibrations are realized with integrated piezoelectric actuators. Due to our knowledge on piezoelectrics, to which the present research project contributed, our group is being invited into new research and development projects (H2020, ERA-NET; EUREKA). It is important to note that the institution regularly invites one or more Slovenian companies into EU projects.
Most important scientific results Annual report 2010, 2011, 2012, final report, complete report on dLib.si
Most important socioeconomically and culturally relevant results Annual report 2010, 2011, 2012, final report, complete report on dLib.si
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