Implementation of new technologies in micromachining and smart electronics for pressure and optical sensors

Code

L2-6159 (C) - included in ARIS records

Head

PhD Drago Resnik

Period

7/1/2004 - 6/30/2007

Range in 2007

0.99 FTE

Science

Engineering sciences and technologies (11)
Other (3)

Reseacher status

Researcher (11)
Junior expert or technical associate (3)

Education

Doctor's degree (8)
Master's degree (1)
Other (5)

Sex

Woman (1)
Man (13)

Status

Employed at RO and RRD (9)
Retired (5)

No. of publications

0 (14)

Projects / Programmes source: ARIS

source: ARIS

Implementation of new technologies in micromachining and smart electronics for pressure and optical sensors

Research activity

Code	Science	Field	Subfield
2.09.00	Engineering sciences and technologies	Electronic components and technologies

Code	Science	Field
T170	Technological sciences	Electronics
T171	Technological sciences	Microelectronics
T150	Technological sciences	Material technology

Keywords

sensors, reliability, electronics for sensor signal conditioning, micromachining

Evaluation (rules)

source: COBISS

Evaluation of bibliographic research performance indicators according to ARIS methodology

Citations Citations for bibliographic records in COBIB.SI that are linked to records in citation databases

source: WoS

source: Scopus

source: COBISS

Researchers (14)

no.	Code	Name and surname	Research area	Role	Period	No. of publicationsNo. of publications
1.	11682	MSc Uroš Aljančič	Electronic components and technologies	Researcher	2004 - 2007	0
2.	01926	PhD Slavko Amon	Electronic components and technologies	Researcher	2004 - 2007	0
3.	08346	Darko Belavič	Electronic components and technologies	Researcher	2004 - 2007	0
4.	17125	Matjaž Cvar		Technical associate	2004 - 2007	0
5.	03333	PhD Žarko Gorup	Electronic components and technologies	Researcher	2004 - 2007	0
6.	23672	Janez Gramc		Technical associate	2004 - 2007	0
7.	19391	Mitja Jerlah		Technical associate	2004 - 2007	0
8.	24574	Sandi Kocjan	Electronic components and technologies	Researcher	2004 - 2007	0
9.	04721	PhD Andrej Levstek	Electronic components and technologies	Researcher	2004 - 2007	0
10.	20186	PhD Matej Možek	Electronic components and technologies	Researcher	2004 - 2007	0
11.	16034	PhD Marko Pavlin	Metrology	Researcher	2004 - 2007	0
12.	05075	PhD Drago Resnik	Electronic components and technologies	Head	2004 - 2007	0
13.	04378	PhD Marina Santo Zarnik	Electronic components and technologies	Researcher	2004 - 2007	0
14.	04383	PhD Danilo Vrtačnik	Electronic components and technologies	Researcher	2004 - 2007	0

Organisations (2)

no.	Code	Research organisation	City	Registration number	No. of publicationsNo. of publications
1.	1538	University of Ljubljana, Faculty of Electrical Engineering	Ljubljana	1626965	65
2.	1704	HIPOT-R&D Research and development in Technologies and Systems	Otočec	5981344	0

Abstract

Proposed applied research will be strongly supported by fundamental knowledge based on our previous work in the field and further improved with new approaches and results. Important part of this work will consist in implementation of smart electronics to the pressure sensor which will sophisticate significantly the performance of pressure sensors such as temperature compensation, autocalibration of the system and traceability as one of the required parameters on today' market. The possibility of miniaturisation of pressure sensor chip will be another subject of interest in this research. The most important factors which are governing the degree of miniaturisation will be extracted and miniaturisation influence on sensor performances will be determined. On the basis of previous work concerning mechanical stress in thin films, the influence on the pressure sensor response will be further examined with regards to temperature dependency, etc. Long term stability due to this efect will also be taken to consideration. In the area of optical sensors for advanced measuring techniques we will merge our experience and know-how in the field of silicon micromachining and that of silicon photosensors to obtain a potential application for our SME partner. This device, as a reflexive photosensor is a new technological solution. For the final realization of the device , however some additional theoretical and experimental work will be inevitable, particularly in the field of micromachining silicon micromirrors. On the basis of the results of this study, it is expected that good performances will be obtained. Results and knowledge gained in the proposed work will serve as a good support to slovene industrial partners, to join and remain in the high-tech area.