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Projects / Programmes source: ARIS

Silicon pressure sensors technologies

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Research activity

Code Science Field Subfield
2.09.02  Engineering sciences and technologies  Electronic components and technologies  Electronic components 

Code Science Field
T171  Technological sciences  Microelectronics 
Keywords
pressure sensor, silicon micromachining, semiconductor technology
Evaluation (rules)
source: COBISS
Evaluation of bibliographic research performance indicators according to ARIS methodology
Citations Citations for bibliographic records in COBIB.SI that are linked to records in citation databases
source: WoS source: Scopus source: COBISS
Researchers (12)
no. Code Name and surname Research area Role Period No. of publications
1.  11682  MSc Uroš Aljančič  Electronic components and technologies  Researcher  2002 - 2004  0 
2.  01926  PhD Slavko Amon  Electronic components and technologies  Researcher  2002 - 2004  0 
3.  08346  Darko Belavič  Electronic components and technologies  Researcher  2002 - 2004  0 
4.  17125  Matjaž Cvar    Researcher  2002 - 2004  0 
5.  20186  PhD Matej Možek  Electronic components and technologies  Researcher  2002 - 2004  0 
6.  16034  PhD Marko Pavlin  Metrology  Researcher  2002 - 2004  0 
7.  02313  PhD Boštjan Peršič  Energy engineering  Researcher  2002 - 2004  0 
8.  05075  PhD Drago Resnik  Electronic components and technologies  Head  2002 - 2004  0 
9.  04378  PhD Marina Santo Zarnik  Electronic components and technologies  Researcher  2002 - 2004  0 
10.  19394  Lojze Simončič    Researcher  2002 - 2004  0 
11.  04383  PhD Danilo Vrtačnik  Electronic components and technologies  Researcher  2002 - 2004  0 
12.  17129  Marijan Žurga    Researcher  2002 - 2004  0 
Organisations (2)
no. Code Research organisation City Registration number No. of publications
1.  1538  University of Ljubljana, Faculty of Electrical Engineering  Ljubljana  1626965  65 
2.  1704  HIPOT-R&D Research and development in Technologies and Systems  Otočec  5981344  0 
Abstract
Investigations of critical effects that are limiting the important parameters of piezoresistive pressure sensors are proposed. These crucial parameters are offset voltage, linearity of sensor response, longterm stability and others. On the basis of results from the investigations of thin film intrinsic mechanical stresses, long term stability behaviour and new etching approaches in the field of micromachining technology of silicon it is expected that improved design and fabrication of low pressure sensors prototypes will result. Investigations of possible limitations in the miniaturization of already developed piezoresistive sensors for new demanding applications arising now on the market, will be undertaken. In the proposed activities, also work in the field of data acquisition and output signal conditioning, based on microcontroller supported electronic circuits will be performed, enabling mastering smart sensor technology. Realised system will find application in the production of biomedical sensors and similar. Results of the proposed R&D activities will support the Slovenian industry in its endeavours to remain in the hightec field on the demanding world market.
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