Equipment
Optical ellipsometry is a non-destructive technique for investigation of surfaces, interfaces and thin films. It probes modifications of the polarization state of optical beam reflected from the sample. Imaging ellipsometer uses microscopic objectives to reduce the size of investigated surface region to the micrometer range. Our ellipsometer uses objectives with extra-long working distance, which provides measurements on surfaces of macroscopic objects. The magnified image of the sample is visualised in reflected light, which propagates through a set of selected polarization sensitive optical elements. The resulting “polarization filtered” image is detected by CCD camera with variable shutter timings and gain control. The system provides ellipsometric analysis with the lateral resolution of 1 μm. This allows the user to perform measurements on microstructured samples. Several regions of interest can be analysed at the same time.
Responsible for equipment:
PhD Martin Čopič
URL:
www.nanocenter.si
first access upon agreement with responsible person, experienced operators through reservation system
Organisations (1)
