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Equipment source: ARIS

ProtoLaser LDI

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Purpose of equipment
The ProtoLaser LDI is an universal, high-resolution, table top laser direct imaging (LDI) system for prototyping on resist-covered substrates. A transferred image has even better defined edges compared to conventional lithography. With a working area of up to 100 x 100 mm and structures down to 1 μm it is an ideal tool for microfluidic designs. Using 100 kHz beam positioning by acousto-optic deflectors, extremely fast writing is possible. Illumination of a typical microfluidic circuit only takes a few minutes. Automated measurements compensate for unevenness of the substrate and applied resists.
Access of equipment
Responsible for equipment: Damjan Svetin
URL: www.nanocenter.si
first access upon agreement with responsible person, experienced operators through reservation system
Organisations (1)
no. Code Research organisation City Registration number No. of publications
1.  3050  Center of excellence on nanoscience and nanotechnology - Nanocenter, Ljubljana  Ljubljana  3666255  0 
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