Loading...
Equipment source: ARIS

Spektroskoptični elipsometer (angl. spectroscopic ellipsometer) SpecEL-2000-VIS z dodatkom za analizo plinov Micro GC 3000 A (leto 2008)

Purpose of equipment
Characterization of transparent thin films (thickness, refractive index).
Access of equipment
Responsible for equipment: PhD Danilo Vrtačnik
URL: http://lmse.fe.uni-lj.si
The equipment is installed in clean room environment and is accessible also to other research institutions.
Research projects (2) Legend
ARIS research and infrastructure programmes (1) Legend
no. Code Title Period Head No. of publicationsNo. of publications
1.  P2-0244  Microstructures and nanostructures  1/1/2004 - 12/31/2008  PhD Slavko Amon 
Organisations (1)
no. Code Research organisation City Registration number No. of publicationsNo. of publications
1.  1538  University of Ljubljana, Faculty of Electrical Engineering  Ljubljana  1626965  65 
Views history
Favourite