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Equipment source: ARIS

System for production of ultra pure dionized water (UPW)

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Purpose of equipment
System for laboratory production of dionized water used in microelectronic processing. Complies with E2 standard.
Access of equipment
Responsible for equipment: PhD Danilo Vrtačnik
URL: http://lmse.fe.uni-lj.si
System is permanently installed and connected to the closed supply loop of cleanroom facility. Deionized water as a producto of the system is available to other institutions
Research projects (2) Legend
no. Code Title Period Head No. of publications
1.  L2-0186  Low power consumption ceramic pressure sensors with digital output  2/1/2008 - 1/30/2011  PhD Marina Santo Zarnik  0 
2.  L3-0309  Piezoresistive Force Sensors for controlled spinal nerve root retraction in lumbar disc surgery – a new surgical instrument for prevention of intraoperative root traction injury  2/1/2008 - 1/30/2011  PhD Roman Bošnjak  0 
ARIS research and infrastructure programmes (1) Legend
no. Code Title Period Head No. of publications
1.  P2-0244  Microstructures and nanostructures  1/1/2004 - 12/31/2008  PhD Slavko Amon  0 
Organisations (1)
no. Code Research organisation City Registration number No. of publications
1.  1538  University of Ljubljana, Faculty of Electrical Engineering  Ljubljana  1626965  65 
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