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Obtaining statistical data

Equipment source: ARIS

Reactor chamber with electronic column for in-situ observation of processes and reactions

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Purpose of equipment
Research equipment using differential pumping allows free switching between three vacuum modes, with the potential simultaneous use of different reactive gases.
Access of equipment
Responsible for equipment: PhD Uroš Cvelbar
URL: https://www.ijs.si/ijsw/Znotraj%20hi%C5%A1e/Desno?action=AttachFile&do=get&tar get=ARRS_Evidenca_opreme_2021.xlsx
Equipment is available by prior arrangement. Please contact uros.cvelbar@ijs.si
ARIS research and infrastructure programmes (1) Legend
no. Code Title Period Head No. of publications
1.  P2-0082  Thin-film structures and plasma surface engineering  1/1/2015 - 12/31/2021  PhD Miran Mozetič  4,670 
Organisations (1)
no. Code Research organisation City Registration number No. of publications
1.  0106  Jožef Stefan Institute  Ljubljana  5051606000  91,101 
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